Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Glow discharge attachment for hydrophilic/hydrophobic treatment (rendering) of substrates (e.g. TEM carbon support films). Fully integrated to allow post-treatment of carbon films without the need to break vacuum after carbon coating
Rotary support for use with the PS-006 planetary gear stage. Includes slip-on specimen holder which converts the planetary gear stage into a rotary stage. Twelve M2 threads for mounting specimens or for the using S-clips. Six mounting clips M2 included.