Silicon wafers and supports
Polished silicon is an excellent substrate for imaging experiments, nanotechnology and micro-fabrication applications. For imaging applications, it is an ideal sample substrate for small particles due to the low background signal of the highly polished surface. For biological applications silicon resembles glass, which makes it a suitable support for growing and/or mounting cells.
The silicon wafers and chips are all P-type, doped with B to provide excellent conductivity for SEM, FIB and STM applications. It is available as wafers, diced wafers or as smaller chips (pieces). The silicon wafer and chips all have a <100> orientation. Cleaving of the wafers to the desired size with a <100> orientation wafers is straight forward and simple.
Two grades of silicon substrates are offered:
- Micro-Tec standard silicon wafers and silicon chips for standard applications and medium resolution imaging.
- Nano-Tec ultra-flat silicon wafers and ultra-flat silicon chips for demanding applications and high resolution imaging.
We also offer a range of wafer holders for using wafers in all brands of SEM. Our wafer carrier trays provide protection for wafers during storage.
For precise breaking of silicon wafers we also offer Wafer cleaving pliers.
Micro-Tec silicon wafer substrates from Micro to Nano are a useful flat substrate for SEM imaging of particles due to the low background and can also be used as sample substrates, micro-fabrication, substrate for thin film research or biological substrates. Micro-Tec Si wafers are packed in a wafer carrier tray for protection. The diced wafer supplied on wafer adhesive disc and packed between two plastic sheets for protection. The Si chips can be easily lift off the adhesive sheet.
Micro-Tec standard silicon wafer substrates are available as:
- Ø2”/51mm silicon wafers
- Ø4”/100mm silicon wafers
- Ø6”/150mm silicon wafers
- Diced Ø4”/100mm silicon wafer in 5x5mm chips (~270 pieces)
Nano-Tec, ultra-flat P silicon wafers have higher specifications than Micro-Tec silicon wafers. They are preferred for demanding applications in micro-fabrication, as substrates for thin film research or biological substrates. The larger wafers with the <100> orientation can be easily cleaved to the desired size. Ultra-flat Nano-Tec Si wafers are clean-room packed in a wafer carrier tray for protection. The ultra-flat Si chips are precision diced with a dicing saw, cleaned and clean-room packed in a gel-box. They can be easily lift off the gel substrate with flat tipped tweezers.
Nano-Tec ultra-flat silicon wafers are available as:
- Ø4”/100mm <P/100> ultra-flat silicon wafers
- Ø6”/150mm <P/100> ultra-flat silicon wafers
- Ultra-flat 5x5mm Si chips; 25 packaged in a gel box
- Ultra-flat 5x5mm Si chips with 200nm thermal SiO2; 25 packaged in a gel box
Silicon wafers
Diced Silicon wafers
- Specifications
- Specifications of Micro-Tec silicon wafers and chips
- Specifications of Nano-Tec ultra-flat silicon wafers and chips
For specifications please see adjacent TABS
Parameter |
Ø2”/51mm wafer |
Ø4”/100mm wafer |
Ø6”/150mm wafer |
Diced Ø4”/100mm |
Product # |
10-008120 |
10-008140 |
10-008160 |
10-008145 |
Orientation |
<100> |
|||
Type |
P (Boron) with one primary flat |
|||
Resistance |
1-30 Ohm/cm |
|||
Coating |
None, native oxide only |
|||
Thickness |
275µm (+/- 20µm) |
525µm (+/- 20µm) |
675µm (+/- 20µm) |
525µm (+/- 20µm) |
Diameter |
51mm |
100mm |
150mm |
100mm |
Chip (die) size |
n.a. |
n.a. |
n.a. |
5x5mm |
Chip quantity |
n.a. |
n.a. |
n.a. |
~270 |
TTV |
≤ 20µm |
|||
Primary flat |
15.9 +/- 1.65mm |
32.5 +/- 2.5mm |
57.5 +/- 2.5mm |
32.5 +/- 2.5mm |
Surface roughness |
<1.5nm, polished on one side |
Parameter |
Ø4”/100mm wafer |
Ø6”/150mm wafer |
5 x 5mm chips |
5x5mm chips with thermal SiO2 |
Product # |
10-008141 |
10-008161 |
10-008150 |
10-008155 |
Orientation |
<100> |
|||
Type |
P (Boron) with one flats |
|||
Resistance |
1-10 Ohm/cm |
|||
Grade |
Prime / CZ Virgin |
|||
Coating |
None, native oxide only |
Thermal SiO2 |
||
Thickness |
525µm (+/- 20µm) |
675µm (+/- 20µm) |
||
Diameter |
100mm |
150mm |
150mm |
150mm |
Chip size |
n.a. |
n.a |
5x5mm |
5x5mm |
Chips quantity |
n.a. |
n.a. |
25 |
25 |
TTV |
≤1.5µm |
|||
Bow |
≤30µm |
|||
Warp |
≤30µm |
|||
Primary flat |
32.5 +/- 2.5mm |
57.5 +/- 2.5mm |
||
Surface roughness |
Typically 0.2- 0.3nm, polished one side |
Ordering information:
-
Micro-Tec P{100} silicon wafer Ø2inch/51mm – 275µm thickness
Micro-Tec P{100} silicon wafer Ø2inch/51mm – 275µm thickness (each)
£25.66 Add to basketMicro-Tec P{100} silicon wafer Ø2inch/51mm – 275µm thickness
Micro-Tec P{100} silicon wafer Ø2inch/51mm – 275µm thickness (each)
£25.66 -
P{100} silicon wafer- Ø4 inch/100mm- 525µm thickness
Micro-Tec P{100} silicon wafer, Ø4 inch/100mm – 525µm thickness (each)
£37.29 Add to basketP{100} silicon wafer- Ø4 inch/100mm- 525µm thickness
Micro-Tec P{100} silicon wafer, Ø4 inch/100mm – 525µm thickness (each)
£37.29 -
Ultra-flat P{100} silicon wafer, Ø4″/100mm – 525µm thickness
Nano-Tec ultra-flat P{100} silicon wafer, Ø4inch/100mm – 525µm thickness (each)
£86.61 Add to basketUltra-flat P{100} silicon wafer, Ø4″/100mm – 525µm thickness
Nano-Tec ultra-flat P{100} silicon wafer, Ø4inch/100mm – 525µm thickness (each)
£86.61 -
Diced P{100} Ø4″/100mm Si wafer, 5 x 5mm chips – 525µm thick
Micro-Tec diced P{100} Ø4inch/100mm silicon wafer, diced in 5 x 5mm chips – 525µm thickness ~270 Chips (each)
£81.79 Add to basketDiced P{100} Ø4″/100mm Si wafer, 5 x 5mm chips – 525µm thick
Micro-Tec diced P{100} Ø4inch/100mm silicon wafer, diced in 5 x 5mm chips – 525µm thickness ~270 Chips (each)
£81.79 -
Micro-Tec diced P{100} diameter: 4inch/100mm silicon wafer
Micro-Tec diced P{100} diameter 4inch/100mm silicon wafer, diced in 7.5 x 7.5mm chips – 525um thickness ~112 Chips (each)
£79.28 Add to basketMicro-Tec diced P{100} diameter: 4inch/100mm silicon wafer
Micro-Tec diced P{100} diameter 4inch/100mm silicon wafer, diced in 7.5 x 7.5mm chips – 525um thickness ~112 Chips (each)
£79.28 -
Micro-Tec diced P {100} 4inch/100mm silicon wafer-diced in 10 x 10mm chips, 525µm thick-55 Chips
Micro-Tec diced P{100} Ø4inch/100mm silicon wafer, diced in 10 x 10mm chips, 525µm thickness ~ 55 Chips (each)
£81.61 Add to basketMicro-Tec diced P {100} 4inch/100mm silicon wafer-diced in 10 x 10mm chips, 525µm thick-55 Chips
Micro-Tec diced P{100} Ø4inch/100mm silicon wafer, diced in 10 x 10mm chips, 525µm thickness ~ 55 Chips (each)
£81.61 -
Ultra-flat P{100} Si chips, 5 x 5mm, 25 gel pack – 675µm thick
Nano-Tec ultra-flat P{100}silicon chips, 5 x 5mm, 25 in gel pack – 675µm thickness (pkg/25)
£124.35 Add to basketUltra-flat P{100} Si chips, 5 x 5mm, 25 gel pack – 675µm thick
Nano-Tec ultra-flat P{100}silicon chips, 5 x 5mm, 25 in gel pack – 675µm thickness (pkg/25)
£124.35 -
Ultra-flat P{100} silicon- 200nm thermal SiO2 chips- 5 x 5mm
Nano-Tec ultra-flat P{100} silicon with 200nm thermal SiO2 chips, 5 x 5mm, 25 each in gel pack – 675µm thickness (pkg/25)
£134.56 Add to basketUltra-flat P{100} silicon- 200nm thermal SiO2 chips- 5 x 5mm
Nano-Tec ultra-flat P{100} silicon with 200nm thermal SiO2 chips, 5 x 5mm, 25 each in gel pack – 675µm thickness (pkg/25)
£134.56 -
P{100} silicon wafer, Ø6inch/150mm – 675µm thickness
Micro-Tec P{100} silicon wafer, Ø6inch/150mm – 675µm thickness (each)
£55.04 Add to basketP{100} silicon wafer, Ø6inch/150mm – 675µm thickness
Micro-Tec P{100} silicon wafer, Ø6inch/150mm – 675µm thickness (each)
£55.04 -
Ultra-flat P{100} silicon wafer- Ø6inch/150mm – 675µm thickness”
Nano-Tec ultra-flat P{100} silicon wafer, Ø6inch/150mm – 675µm thickness (each)
£110.92 Add to basketUltra-flat P{100} silicon wafer- Ø6inch/150mm – 675µm thickness”
Nano-Tec ultra-flat P{100} silicon wafer, Ø6inch/150mm – 675µm thickness (each)
£110.92