Substages and linear tables
Labtech offers the full range of precision substages or linear tables from Kleindiek Nanotechnik. These stages are designed to provide higher precision than the standard SEM/FIB stages.
Available in a standard vacuum version for EM as well as versions for use in UHV and at low temperatures.
For full specifications please see each individual stage.
E5AT five axis eucentric stage
x,y,z,r travel with +/- 90 deg tilt and encoders
SFLT3310 super flat linear table
x and y travel
LT-12830 linear table
x and y travel. Encoder option. UHV option.
LT-6820 linear table
X,Y and Z travel. Encoders. UHV option.
LT-6620 linear table
X,Y and Z travel. UHV version
LT-3310 linear table
X,Y, Z and R travel. UHV version.