Welcome to our new site, if you can’t find what you’re looking for please get in touch via our contact us page.
Welcome to our new site, if you can’t find what you’re looking for please get in touch via our contact us page.
SEMI-KLEEN plasma cleaner- standard configuration including tabletop controller with embedded microcomputer and LCD touchscreen user interface; Remote plasma source (high quality quartz tube) with KF/NW40 vacuum interface.Low particle source design- qualified for semiconductor application where PWP is a concern. PC remote control software with intuitive user interface.60-recipe support in microcontroller. 75 Watt RF power supply- no need to adjust impedance matching.Plasma sensor for plasma strength monitor;Electronic gas flow control with pressure sensor feedback control. Smart-Schedule feature for automatic cleaning. Intelligent safe and expert operation mode. 15 feet high quality high power RF cable; D-Sub 9 PC control cable; D-Sub 15 source control cable.
SEMI-KLEEN plasma cleaner- standard configuration including tabletop controller with embedded microcomputer and LCD touchscreen user interface; Remote plasma source (high quality quartz tube) with KF/NW40 vacuum interface.Low particle source design- qualified for semiconductor application where PWP is a concern. PC remote control software with intuitive user interface.60-recipe support in microcontroller. 75 Watt RF power supply- no need to adjust impedance matching.Plasma sensor for plasma strength monitor;Electronic gas flow control with pressure sensor feedback control. Smart-Schedule feature for automatic cleaning. Intelligent safe and expert operation mode. 15 feet high quality high power RF cable; D-Sub 9 PC control cable; D-Sub 15 source control cable.
HS-010 head storage box for maintaining sputtering or carbon modules under vacuum when not in use.
HS-010 head storage box for maintaining sputtering or carbon modules under vacuum when not in use.
Edwards nXDS10i dry scroll pump.Peak pumping speed 11.4 m3/hr (6.7 cfm). Ultimate pressure 0.007 mbar (0.005 torr).Pump controller with push button control- remote serial and parallel control plus USB service interface.Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention.Inlet port : NW25- exhaust port : NW25
Edwards nXDS10i dry scroll pump.Peak pumping speed 11.4 m3/hr (6.7 cfm). Ultimate pressure 0.007 mbar (0.005 torr).Pump controller with push button control- remote serial and parallel control plus USB service interface.Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention.Inlet port : NW25- exhaust port : NW25
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.