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SEMI-KLEEN plasma cleaner, standard configuration


SEMI-KLEEN plasma cleaner- standard configuration including tabletop controller with embedded microcomputer and LCD touchscreen user interface; Remote plasma source (high quality quartz tube) with KF/NW40 vacuum interface.Low particle source design- qualified for semiconductor application where PWP is a concern. PC remote control software with intuitive user interface.60-recipe support in microcontroller. 75 Watt RF power supply- no need to adjust impedance matching.Plasma sensor for plasma strength monitor;Electronic gas flow control with pressure sensor feedback control. Smart-Schedule feature for automatic cleaning. Intelligent safe and expert operation mode. 15 feet high quality high power RF cable; D-Sub 9 PC control cable; D-Sub 15 source control cable.