nXDS6i Scroll Pump.Peak pumping speed: 6m3/hr (3.53 cfm).Utimate pressure: 0.02mbar (1.5e-2 torr).Inverter drive with push button control – remote serial and parallel.control and USB interface.Supply: 100-127/200-240V 1ph 50/60Hz without user intervention.Inlet port: NW25. Exhaust port: NW25.
Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.