Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Edwards nXDS10i dry scroll pump.Peak pumping speed 11.4 m3/hr (6.7 cfm). Ultimate pressure 0.007 mbar (0.005 torr).Pump controller with push button control- remote serial and parallel control plus USB service interface.Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention.Inlet port : NW25- exhaust port : NW25
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.