Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Plug-in style rotary specimen table with smooth adjustment of table height, tilt angle and rotational speed. The 80mm diameter stage has locations for up to 20 standard (13 mm) SEM pin stubs or five 25mm stubs. On request other sizes and styles of SEM stubs can be accommodated.
Consisting of base plate for connection to the tilt and height adjustable specimen table of the CCU-010 base unit. Specimen holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC micro-motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
Plasma cleaning accessory for the pre-treatment (cleaning) or after-treatment (glow discharge effect) of specimens in combination with a coating process.