Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.
Coating LAB Windows-based software can be installed on a laptop for monitoring and documenting coating processes. Fully automatic logs and charts containing all process-related data can be exported as screenshots or CSV files for Office applications. Available information includes process vacuum, current and voltage along with film thickness and coating rates (Internet connection required). Coating-LAB will allow remote service access for error diagnosis and process optimisation.