Quartz crystals for FTMs

EM-Tec quartz crystals are particularly suited for thickness monitors (FTM), thickness controllers and quartz crystal microbalances (QCM) used with a range of vacuum instrumentation, including SEM sputter coaters and EM carbon evaporation systems.

EM-Tec quartz crystals are plano-convex, 14.0mm (0.55”) in diameter and are compatible with all thickness measurement, controller and QCM systems using 5MHz and 6MHz sensors. These are used on sputter coaters, carbon coaters and vacuum deposition systems from: Cressington/Agar, Bal-Tec, Denton, Emitech, Edwards, JEOL, Leica, Polaron/Bio-rad/Fisons/Thermo VG/Quorum and Safematic. Crystals are packaged in a flat pack carousel which contains ten QCM crystals.

EM-Tec quartz crystals are available with two types of coating for the electrodes:

• Gold electrodes are standard and recommended for low film stress deposition materials such as gold, silver, palladium, gold/palladium, platinum/palladium and copper
• Silver electrodes are recommended for high film stress deposition materials such as chromium, nickel, platinum, iridium and carbon