7 inch resistive LCD industrial touchscreen controller. Fully automatic operation with 20 recipe support. Job sequence mode operation for executing three cleaning steps. Two mass flow controller (MFC) regulated gas inputs (can support up to three MFC upon request). Corrosion resistant pirani pressure sensor. Venting/purging port with electronic solenoid valve (Swagelock 1/4″ compression fitting). One pumping port with electronic shutoff valve and standard NW/KF25 vacuum port.
Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.