Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Plug-in style rotary specimen table with smooth adjustment of table height, tilt angle and rotational speed. The 80mm diameter stage has locations for up to 20 standard (13 mm) SEM pin stubs or five 25mm stubs. On request other sizes and styles of SEM stubs can be accommodated.