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Prober shuttle with eight probers and three axis substage


An electrical characterisation system for electron microscopy. The system contains the latest generation of probers (MM4-EM) mounted on a load-lock compatible platform with an integrated super-flat three axis substage. A low-current measurement kit is integrated into each manipulator. The system includes control electronics in a 19″ electronics rack, a joypad, a vacuum flange, a vacuum feedthrough, sample probe needles, iProbe control software and an operator’s handbook.