Consisting of base plate for connection to the tilt and height adjustable specimen table of the CCU-010 base unit. Specimen holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC micro-motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.