Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Coating LAB Windows-based software can be installed on a laptop for monitoring and documenting coating processes. Fully automatic logs and charts containing all process-related data can be exported as screenshots or CSV files for Office applications. Available information includes process vacuum, current and voltage along with film thickness and coating rates (Internet connection required). Coating-LAB will allow remote service access for error diagnosis and process optimisation.
Consisting of base plate for connection to the tilt and height adjustable specimen table of the CCU-010 base unit. Specimen holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC micro-motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately