Plasma cleaning accessory for the pre-treatment (cleaning) or after-treatment (glow discharge effect) of specimens in combination with a coating process.
Consisting of base plate for connection to the tilt and height adjustable specimen table of the CCU-010 base unit. Specimen holders for six large (Ø 25.4mm) or six small (Ø12.7mm) SEM pin stubs. DC micro-motor for rotation and planetary movement, quartz sensor (centre), speed control: 0-100%, rotation: 0-20rpm approximately, planets: 0-65rpm approximately
Edwards nXDS10i dry scroll pump.Peak pumping speed 11.4 m3/hr (6.7 cfm). Ultimate pressure 0.007 mbar (0.005 torr).Pump controller with push button control- remote serial and parallel control plus USB service interface.Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention.Inlet port : NW25- exhaust port : NW25