Upgrade kit for converting CCU-010 LV to high vacuum CCU-010 HV specification. Includes turbomolecular pump (Pfeiffer Hi Pace 80), conversion kit, cable and other small components. Note: the rotary vacuum pump used with the LV version will be required to “back” the internally mounted turbomolecular pump.
Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
Edwards nXDS10i dry scroll pump.Peak pumping speed 11.4 m3/hr (6.7 cfm). Ultimate pressure 0.007 mbar (0.005 torr).Pump controller with push button control- remote serial and parallel control plus USB service interface.Supply 100-127/200-240V (+/- 10%) 1ph 50/60Hz without user intervention.Inlet port : NW25- exhaust port : NW25