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Tergeo plasma cleaner 75W


Tergeo plasma cleaner 75W 13.56MHz. Thick-wall quartz tube (5mm thickness) with inner diameter 110mm and outer diameter 120mm, depth 280mm. In-situ plasma source for immersion mode cleaning. Plasma sensor for quantitative plasma intensity measurement. 75W 13.56MHz high frequency RF supply with auto-matching. Adjustable from 1 to 75W at 1w interval. No pulsing mode.