The LC-006 is a large chamber option for all Safematic CCU-010 coaters and allows specimens up to 6” (152mm) in diameter to be coated.
The LC-006 comes with a holder for 6” wafers, but other holders can be fitted to allow other specimen sizes and multiple smaller samples to be accommodated.
The LC-006 can be retrofitted to any CCU-010 coater.
For further details: Safematic LC-006