Fully integrated magnetron (type A) sputtering module for standard sputtering rates. Including high resolution sputtering assembly. Fitted with target cooling and monitoring – automatic source shutter and electronically controlled process vacuum control. Note: sputtering target not included – please select required metat target(s) from the options list.
nXDS6i Scroll Pump.Peak pumping speed: 6m3/hr (3.53 cfm).Utimate pressure: 0.02mbar (1.5e-2 torr).Inverter drive with push button control – remote serial and parallel.control and USB interface.Supply: 100-127/200-240V 1ph 50/60Hz without user intervention.Inlet port: NW25. Exhaust port: NW25.
Rotary support for use with the PS-006 planetary gear stage. Includes slip-on specimen holder which converts the planetary gear stage into a rotary stage. Twelve M2 threads for mounting specimens or for the using S-clips. Six mounting clips M2 included.